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Tungsten for ion implanters

Tungsten for ion implanters

Standard GB, ASTM Material More 99.95% Mo
Condition Sintering Specification as required or sample

Tungsten materials used in ion implanters are mainly used to prepare parts in ion source of ion implanters. It is a high-purity tungsten metal powder as raw materials, the use of powder metallurgy method and then rolled or forged tungsten, with high density, high hardness, extremely low pressure, excellent high temperature strength and other advantages, belongs to the new materials industry "thirteen-five" development plan in the "rare metal materials" high-tech content materials.

  • Ion implantation is a kind of high technology for surface modification of materials which has been developed and widely used in the world in the past 30 years. It can optimize the surface properties of materials or obtain some new excellent properties. Due to the unique and outstanding characteristics of this high technology, it is a very important technology in modern integrated circuit manufacturing. It uses ion implanter to dope the semiconductor and change the conductivity and transistor structure of the semiconductor.


    Since the ion source is converted to plasma ions during ion implantation, the working temperature of more than 2000 ° C will be generated, and the ion beam eruption will also produce a large ionic kinetic energy, and the general metal will soon melt. Therefore, inert metals with relatively large mass and density are needed to maintain the orientation of the ion beam and increase the durability of the component. Tungsten material has the advantages of stable high temperature chemical properties, small thermal denaturation and long service life, and has become the first choice of ion source parts and consumables for ion implanters in the semiconductor industry. The shielding cylinder of the emission cathode, the emission panel, the center fixed rod, and the arc indoor wire plate are all called ion implanted tungsten parts.

About us:

Q: Are you trading company or manufacturer ?

A: We are a trading company integrating production and sales, with more than 20 years of experience in the production and processing of refractory metals.


Q: How long is your delivery time?

A: Generally,it will take around 30 days after order confirm.The specific delivery time depends on the specific product and the quantity you needed.

Q. Do you test all your goods before delivery?
A: Yes, we will do 100% test on our cemented carbide products before delivery.

Contact us

Tel: 86-29-85325399  Fax: 86-29-85325610       QQ:177488228
Address: Suite A2202-03, Qujiang Exhibition International Building, Yanzhan Road, Xi'an, 710061, China

Address: Suite A2202-03, Qujiang Exhibition International Building, Yanzhan Road, Xi'an, 710061, China

Tel: 86-29-85325399 Fax: 86-29-85325610


Our Tantalum and Tungsten products are DRC Conflict-Free.